Photolithography: Basic Function

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4.8 (1,068 Bewertungen)
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MJ

Apr 11, 2020

Its a really nice informative course. But Etching was really boring part and difficult to understand compared to other parts of the module. If that can be made more friendly it would be great.

HH

Mar 17, 2019

I would like to express my thankfulness to you, for your wonderful lessons. I learned a lot of things from you. Your expertise and the way of teaching are quite fantastic. Many thanks again.

Aus der Unterrichtseinheit
Nanofabrication: Patterning and Self-Assembly
In this module, we will investigate 5 different methods used in nanotechnology for patterning. You will be able to explain the basic processes of photolithography, e-beam lithography, ion beam lithography, hot embossing, and self-assembly.

Unterrichtet von

  • Nan M. Jokerst

    Nan M. Jokerst

    J. A. Jones Professor of Electrical and Computer Engineering
  • Carrie Donley

    Carrie Donley

    Director of CHANL (Chapel Hill Analytical and Nanofabrication Laboratory)
  • James Cahoon

    James Cahoon

    Assistant Professor
  • Jacob Jones

    Jacob Jones

    Professor

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